• WID-300

WID-300

8",12" inch wafer available

E&R WID Si wafer marking

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E&R WID Glass wafer marking

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Marking Performance

Marking Modes

Softmark (Dark Mark), Hardmark (White Mark), Dot Matrix

Fonts

Dot Matrix (SEMI 5x9, 10x18, 15x23, and 9x17)

Barcode (SEMI 412, IBM 412)

2D Code (SEMI T7)

Dot Size

25 ~ 80um (depending on material & process)

Dot Depth

0.1 – 3 μm (Si)

Repeatability

± 100um

WPH

~150

Handling System

Wafer Size

8",12"

Robot

Double Arm Robot

Wafer handling

Vacuum

Load Port

FOUP x 2

Alignment

Optical alignment for both flatted and notched wafers

Workstation

Operator System

Win7

GUI

English / Chinese

Communication

SECS II / GEM Interface optional