WID-300
E&R WID Si wafer marking
E&R WID Glass wafer marking
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Marking Performance |
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Marking Modes |
Softmark (Dark Mark), Hardmark (White Mark), Dot Matrix |
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Fonts |
Dot Matrix (SEMI 5x9, 10x18, 15x23, and 9x17) Barcode (SEMI 412, IBM 412) 2D Code (SEMI T7) |
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Dot Size |
25 ~ 80um (depending on material & process) |
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Dot Depth |
0.1 – 3 μm (Si) |
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Repeatability |
± 100um |
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WPH |
~150 |
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Handling System |
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Wafer Size |
8",12" |
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Robot |
Double Arm Robot |
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Wafer handling |
Vacuum |
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Load Port |
FOUP x 2 |
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Alignment |
Optical alignment for both flatted and notched wafers |
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Workstation |
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Operator System |
Win7 |
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GUI |
English / Chinese |
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Communication |
SECS II / GEM Interface optional |