微波清洗設備 MW-600
MW-600 is a fully automatic in-line plasma processing system for IC assembly applications. With the working area up to 600 x 600mm, it is optimized for processing the large panel like fan-out panel or FPCB/PCB sheet.
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Applications
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Surface cleaning and activation prior to epoxy molding
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Surface cleaning and activation prior to lamination of the insulation film
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Thinning the polymer film, e.g. ABF, PI, etc.
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Residue removal of photoresist or polymer
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Features
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Microwave power supply generates high density plasma species to enhance the processing speed.
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Electrode-free plasma source to eliminate the risk of electrostatic damage(ESD).
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Pulse mode operation can reduce the processing temperature.
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Loading/unloading modules selectable to accommodate AGV, conveyor or robot transfer system
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Automation, SECS/GEM, is available as an option.