In-line式

Plasmax – 604A/E

Handler Slot magazine to Slot magazine Quarter-tracks can accommodate four strips in one chamber to clean substrate/lead frame

Plasmax – 602A/E

Handler Slot magazine to Slot magazine. Dual tracks can accommodate two strips in one chamber to clean substrate/lead frame

Plasmax – 601A

Handling 8” wafer with ring for a wafer surface cleaning